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Wafer Defect observing instrument:HS-WDI
Semi-Automatic Contactless Wafer Detector:HS-NCS-200SA
Wafer Roughness Detector:HS-SRT-301
Silicon O/C Content Tester:HS-OCT-2000
Silicon Phosphor and Boron Analyze system: HS-ICP-MS
Silicon O/C Content Tester:HS-OCT-6700
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